Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11118278 | Enhanced plating bath and additive chemistries for cobalt plating | Ismail Emesh, Chris Pabelico | 2021-09-14 |
| 11075165 | Methods and apparatus for forming dual metal interconnects | Suketu Arun Parikh, Rong Tao, Joung Joo Lee, Seshadri Ganguli, Shirish A. PETHE +3 more | 2021-07-27 |
| 11056277 | Magnetized substrate carrier apparatus with shadow mask for deposition | Daniel Lee Diehl, Alexander Lerner | 2021-07-06 |
| 11047039 | Substrate carrier having hard mask | Alexander Lerner, Kim Vellore, Ami Sade, Steven V. Sansoni, Andrew J. Constant +4 more | 2021-06-29 |
| 11024537 | Methods and apparatus for hybrid feature metallization | Ismail Emesh, Xikun Wang | 2021-06-01 |
| 10950500 | Methods and apparatus for filling a feature disposed in a substrate | Xikun Wang, Ismail Emesh, Jianxin Lei, Wenting Hou | 2021-03-16 |