Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177254 | Stacked transistor device | Sanjay Natarajan | 2021-11-16 |
| 11131022 | Atomic layer self aligned substrate processing and integrated toolset | — | 2021-09-28 |
| 11075165 | Methods and apparatus for forming dual metal interconnects | Rong Tao, Roey Shaviv, Joung Joo Lee, Seshadri Ganguli, Shirish A. PETHE +3 more | 2021-07-27 |
| 11054815 | Apparatus for cost-effective conversion of unsupervised fault detection (FD) system to supervised FD system | Bradley D. Schulze, Jimmy Iskandar, Jigar Bhadriklal Patel | 2021-07-06 |
| 11049770 | Methods and apparatus for fabrication of self aligning interconnect structure | — | 2021-06-29 |
| 10923396 | Method of forming self-aligned via | Mihaela Balseanu | 2021-02-16 |
| 10892198 | Systems and methods for improved performance in semiconductor processing | Chirantha Rodrigo, Tsz Keung Cheung, Satya Gowthami Achanta, Jingchun Zhang, Saravjeet Singh +1 more | 2021-01-12 |