Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11081623 | Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices | Mingwei Zhu, Nag B. Patibandla, Rongjun Wang, Vivek Agrawal, Anantha K. Subramani | 2021-08-03 |
| 11056277 | Magnetized substrate carrier apparatus with shadow mask for deposition | Alexander Lerner, Roey Shaviv | 2021-07-06 |
| 10886155 | Optical stack deposition and on-board metrology | Mingwei Zhu, Zihao Yang, Nag B. Patibandla, Yong Cao, Weimin Zeng +5 more | 2021-01-05 |