Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177136 | Abatement and strip process chamber in a dual loadlock configuration | Jared Ahmad Lee, Martin Jeffrey Salinas, Paul B. Reuter, Imad Yousif | 2021-11-16 |
| 11171008 | Abatement and strip process chamber in a dual load lock configuration | Jared Ahmad Lee, Martin Jeffrey Salinas, Paul B. Reuter, Imad Yousif | 2021-11-09 |
| 11090893 | Method of reclaiming a seal | Shagun P. Maheshwari, Yao-Hung YANG, Tom K. Cho, Yu-Chi Yeh, Andrew Yu +1 more | 2021-08-17 |
| 10991552 | Cooling mechanism utilized in a plasma reactor with enhanced temperature regulation | Victor Calderon, Martin Jeffrey Salinas, Valentin N. Todorow | 2021-04-27 |