Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177115 | Dual-level pulse tuning | Gary Leray, James Rogers | 2021-11-16 |
| 11094511 | Processing chamber with substrate edge enhancement processing | Changhun Lee, Michael D. Willwerth, Hean Cheal Lee, Hun Sang Kim | 2021-08-17 |
| 10991552 | Cooling mechanism utilized in a plasma reactor with enhanced temperature regulation | Aniruddha Pal, Victor Calderon, Martin Jeffrey Salinas | 2021-04-27 |