Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D931240 | Substrate support pedestal | Changhun Lee, Jeffrey Ludwig | 2021-09-21 |
| 11094511 | Processing chamber with substrate edge enhancement processing | Changhun Lee, Valentin N. Todorow, Hean Cheal Lee, Hun Sang Kim | 2021-08-17 |