Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11180851 | Rotary reactor for uniform particle coating with thin films | Colin C. Neikirk, Pravin K. Narwankar, Kaushal Gangakhedkar, Visweswaren Sivaramakrishnan, Jonathan Frankel +2 more | 2021-11-23 |
| 11174552 | Rotary reactor for uniform particle coating with thin films | Colin C. Neikirk, Pravin K. Narwankar, Kaushal Gangakhedkar, Visweswaren Sivaramakrishnan, Jonathan Frankel +2 more | 2021-11-16 |
| 11094577 | Apparatus and methods for wafer chucking on a susceptor for ALD | Kaushal Gangakhedkar | 2021-08-17 |
| 11085129 | Device to increase deposition uniformity in spatial ALD processing chamber | Alexander S. Polyak | 2021-08-10 |
| 11043386 | Enhanced spatial ALD of metals through controlled precursor mixing | Kelvin Chan, Yihong Chen, Jared Ahmad Lee, Kevin Griffin, Srinivas Gandikota +1 more | 2021-06-22 |
| 10959294 | High temperature heater for processing chamber | Alexander S. Polyak, Garry K. Kwong | 2021-03-23 |
| 10954596 | Temporal atomic layer deposition process chamber | Alexander S. Polyak | 2021-03-23 |
| 10900125 | Apparatus for susceptor temperature verification and methods of use | Kevin Griffin | 2021-01-26 |