Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11180846 | Fine leveling of large carousel based susceptor | — | 2021-11-23 |
| 11180851 | Rotary reactor for uniform particle coating with thin films | Colin C. Neikirk, Pravin K. Narwankar, Visweswaren Sivaramakrishnan, Jonathan Frankel, David Masayuki Ishikawa +2 more | 2021-11-23 |
| 11174552 | Rotary reactor for uniform particle coating with thin films | Colin C. Neikirk, Pravin K. Narwankar, Visweswaren Sivaramakrishnan, Jonathan Frankel, David Masayuki Ishikawa +2 more | 2021-11-16 |
| 11094577 | Apparatus and methods for wafer chucking on a susceptor for ALD | Joseph Yudovsky | 2021-08-17 |