Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11085129 | Device to increase deposition uniformity in spatial ALD processing chamber | Joseph Yudovsky | 2021-08-10 | $94,755,000 |
| 10954596 | Temporal atomic layer deposition process chamber | Joseph Yudovsky | 2021-03-23 | $48,969,000 |
| 10959294 | High temperature heater for processing chamber | Joseph Yudovsky, Garry K. Kwong | 2021-03-23 | $48,969,000 |