Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D938373 | Substrate transfer structure | Benjamin B. Riordon, Mitchell DiSanto, Paul Forderhase, Gary Wyka, Jeffrey C. Hudgens +7 more | 2021-12-14 |
| 11117265 | Robot for simultaneous substrate transfer | Paul Z. Wirth, Charles T. Carlson | 2021-09-14 |
| 11049761 | Shutter disk for physical vapor deposition chamber | Karl M. Brown | 2021-06-29 |
| 10984990 | Electrode assembly | Ramesh Bokka, Jay D. Pinson, II, Luke Bonecutter | 2021-04-20 |