Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119060 | Defect location accuracy using shape based grouping guided defect centering | Martin Plihal | 2021-09-14 |
| 11035666 | Inspection-guided critical site selection for critical dimension measurement | Arpit Yati, Hari Pathangi | 2021-06-15 |
| 10957608 | Guided scanning electron microscopy metrology based on wafer topography | Arpit Yati, Shivam Agarwal, Andrew Cross | 2021-03-23 |
| 10901391 | Multi-scanning electron microscopy for wafer alignment | Jens Timo Neumann, Philipp Huethwohl, Thomas Korb, Raghavendra Hanumantha Nayak | 2021-01-26 |