Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10901391 | Multi-scanning electron microscopy for wafer alignment | Jagdish Chandra Saraswatula, Jens Timo Neumann, Philipp Huethwohl, Thomas Korb | 2021-01-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10901391 | Multi-scanning electron microscopy for wafer alignment | Jagdish Chandra Saraswatula, Jens Timo Neumann, Philipp Huethwohl, Thomas Korb | 2021-01-26 |