Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11092893 | Inspection sensitivity improvements for optical and electron beam inspection | Roel Gronheid | 2021-08-17 |
| 10957608 | Guided scanning electron microscopy metrology based on wafer topography | Arpit Yati, Shivam Agarwal, Jagdish Chandra Saraswatula | 2021-03-23 |