Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11092893 | Inspection sensitivity improvements for optical and electron beam inspection | Andrew Cross | 2021-08-17 |
| 10901325 | Determining the impacts of stochastic behavior on overlay metrology data | Evgeni Gurevich, Michael Adel, Yoel Feler, Vladimir Levinski, Dana Klein +1 more | 2021-01-26 |