Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11182892 | Periodic semiconductor device misregistration metrology system and method | Detlef Michelsson | 2021-11-23 |
| 11164307 | Misregistration metrology by using fringe Moiré and optical Moiré effects | Mark Ghinovker, Evgeni Gurevich, Vladimir Levinski, Alexander Svizher | 2021-11-02 |
| 11137692 | Metrology targets and methods with oblique periodic structures | Mark Ghinovker, Alexander Svizher, Vladimir Levinski, Inna Tarshish-Shapir | 2021-10-05 |
| 11073768 | Metrology target for scanning metrology | Andrew V. Hill, Amnon Manassen, Gilad Laredo, Mark Ghinovker, Vladimir Levinski | 2021-07-27 |
| 10901325 | Determining the impacts of stochastic behavior on overlay metrology data | Evgeni Gurevich, Michael Adel, Roel Gronheid, Vladimir Levinski, Dana Klein +1 more | 2021-01-26 |