Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164307 | Misregistration metrology by using fringe Moiré and optical Moiré effects | Yoel Feler, Mark Ghinovker, Evgeni Gurevich, Alexander Svizher | 2021-11-02 |
| 11137692 | Metrology targets and methods with oblique periodic structures | Yoel Feler, Mark Ghinovker, Alexander Svizher, Inna Tarshish-Shapir | 2021-10-05 |
| 11112704 | Mitigation of inaccuracies related to grating asymmetries in scatterometry measurements | Ido Adam, Amnon Manassen, Yuval Lubashevsky | 2021-09-07 |
| 11101153 | Parameter-stable misregistration measurement amelioration in semiconductor devices | Yuri Paskover, Sharon Aharon, Amnon Manassen | 2021-08-24 |
| 11073768 | Metrology target for scanning metrology | Andrew V. Hill, Amnon Manassen, Gilad Laredo, Yoel Feler, Mark Ghinovker | 2021-07-27 |
| 11060845 | Polarization measurements of metrology targets and corresponding target designs | Eran Amit, Barry Loevsky, Andrew V. Hill, Amnon Manassen, Nuriel Amir +1 more | 2021-07-13 |
| 10901325 | Determining the impacts of stochastic behavior on overlay metrology data | Evgeni Gurevich, Michael Adel, Roel Gronheid, Yoel Feler, Dana Klein +1 more | 2021-01-26 |
| 10890436 | Overlay targets with orthogonal underlayer dummyfill | Nuriel Amir, Guy M. Cohen, Michael Adel | 2021-01-12 |