Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11073768 | Metrology target for scanning metrology | Andrew V. Hill, Amnon Manassen, Yoel Feler, Mark Ghinovker, Vladimir Levinski | 2021-07-27 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11073768 | Metrology target for scanning metrology | Andrew V. Hill, Amnon Manassen, Yoel Feler, Mark Ghinovker, Vladimir Levinski | 2021-07-27 |