| 11187838 |
Spectral filter for high-power fiber illumination sources |
Andrew V. Hill, Ohad Bachar, Avi Abramov |
2021-11-30 |
| 11156846 |
High-brightness illumination source for optical metrology |
Andrew V. Hill, Ohad Bachar, Avi Abramov |
2021-10-26 |
| 11119417 |
Single cell grey scatterometry overlay targets and their measurement using varying illumination parameter(s) |
Yuri Paskover, Eran Amit |
2021-09-14 |
| 11112704 |
Mitigation of inaccuracies related to grating asymmetries in scatterometry measurements |
Ido Adam, Vladimir Levinski, Yuval Lubashevsky |
2021-09-07 |
| 11101153 |
Parameter-stable misregistration measurement amelioration in semiconductor devices |
Vladimir Levinski, Yuri Paskover, Sharon Aharon |
2021-08-24 |
| 11085754 |
Enhancing metrology target information content |
Eran Amit, Nadav Gutman |
2021-08-10 |
| 11073768 |
Metrology target for scanning metrology |
Andrew V. Hill, Gilad Laredo, Yoel Feler, Mark Ghinovker, Vladimir Levinski |
2021-07-27 |
| 11060845 |
Polarization measurements of metrology targets and corresponding target designs |
Eran Amit, Barry Loevsky, Andrew V. Hill, Nuriel Amir, Vladimir Levinski +1 more |
2021-07-13 |
| 10976562 |
Nano-structured non-polarizing beamsplitter |
Dmitry Gorelik, Andrew V. Hill, Ohad Bachar, Daria Negri |
2021-04-13 |
| 10943838 |
Measurement of overlay error using device inspection system |
Choon Hoong Hoo, Fangren Ji, Liran Yerushalmi, Antonio Mani, Allen Park +3 more |
2021-03-09 |