Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164307 | Misregistration metrology by using fringe Moiré and optical Moiré effects | Yoel Feler, Evgeni Gurevich, Vladimir Levinski, Alexander Svizher | 2021-11-02 |
| 11137692 | Metrology targets and methods with oblique periodic structures | Yoel Feler, Alexander Svizher, Vladimir Levinski, Inna Tarshish-Shapir | 2021-10-05 |
| 11119419 | Moiré target and method for using the same in measuring misregistration of semiconductor devices | — | 2021-09-14 |
| 11073768 | Metrology target for scanning metrology | Andrew V. Hill, Amnon Manassen, Gilad Laredo, Yoel Feler, Vladimir Levinski | 2021-07-27 |
| 10990022 | Field-to-field corrections using overlay targets | Enna Leshinsky-Altshuller, Inna Tarshish-Shapir, Diana Shaphirov, Guy Ben Dov, Roie Volkovich +1 more | 2021-04-27 |