Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164307 | Misregistration metrology by using fringe Moiré and optical Moiré effects | Yoel Feler, Mark Ghinovker, Vladimir Levinski, Alexander Svizher | 2021-11-02 |
| 10901325 | Determining the impacts of stochastic behavior on overlay metrology data | Michael Adel, Roel Gronheid, Yoel Feler, Vladimir Levinski, Dana Klein +1 more | 2021-01-26 |