Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10901325 | Determining the impacts of stochastic behavior on overlay metrology data | Evgeni Gurevich, Michael Adel, Roel Gronheid, Yoel Feler, Vladimir Levinski +1 more | 2021-01-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10901325 | Determining the impacts of stochastic behavior on overlay metrology data | Evgeni Gurevich, Michael Adel, Roel Gronheid, Yoel Feler, Vladimir Levinski +1 more | 2021-01-26 |