Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075126 | Misregistration measurements using combined optical and electron beam technology | Liran Yerushalmi, Nadav Gutman | 2021-07-27 |
| 11060845 | Polarization measurements of metrology targets and corresponding target designs | Eran Amit, Barry Loevsky, Andrew V. Hill, Amnon Manassen, Nuriel Amir +1 more | 2021-07-13 |
| 11018064 | Multiple-tool parameter set configuration and misregistration measurement system and method | Eitan Herzel | 2021-05-25 |
| 10990022 | Field-to-field corrections using overlay targets | Enna Leshinsky-Altshuller, Inna Tarshish-Shapir, Mark Ghinovker, Diana Shaphirov, Guy Ben Dov +1 more | 2021-04-27 |
| 10962951 | Process and metrology control, process indicators and root cause analysis tools based on landscape information | Yaniv Abramovitz | 2021-03-30 |
| 10928739 | Method of measuring misregistration of semiconductor devices | Ido Dolev | 2021-02-23 |