Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11209737 | Performance optimized scanning sequence for eBeam metrology and inspection | Henning Stoschus, Stefan Eyring, Ulrich Pohlmann, Inna Steely-Tarshish | 2021-12-28 |
| 11085754 | Enhancing metrology target information content | Eran Amit, Amnon Manassen | 2021-08-10 |
| 11075126 | Misregistration measurements using combined optical and electron beam technology | Roie Volkovich, Liran Yerushalmi | 2021-07-27 |
| 10897566 | Direct focusing with image binning in metrology tools | Boris Golovanevsky, Noam Gluzer | 2021-01-19 |