Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10943838 | Measurement of overlay error using device inspection system | Choon Hoong Hoo, Amnon Manassen, Liran Yerushalmi, Antonio Mani, Allen Park +3 more | 2021-03-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10943838 | Measurement of overlay error using device inspection system | Choon Hoong Hoo, Amnon Manassen, Liran Yerushalmi, Antonio Mani, Allen Park +3 more | 2021-03-09 |