Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11118903 | Efficient illumination shaping for scatterometry overlay | Andrew V. Hill | 2021-09-14 |
| 10976562 | Nano-structured non-polarizing beamsplitter | Andrew V. Hill, Ohad Bachar, Amnon Manassen, Daria Negri | 2021-04-13 |