Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D938373 | Substrate transfer structure | Jason M. Schaller, Benjamin B. Riordon, Mitchell DiSanto, Paul Forderhase, Gary Wyka +7 more | 2021-12-14 |
| 11117265 | Robot for simultaneous substrate transfer | Charles T. Carlson, Jason M. Schaller | 2021-09-14 |
| 11107709 | Temperature-controllable process chambers, electronic device processing systems, and manufacturing methods | — | 2021-08-31 |
| 11032464 | Methods and apparatus for absolute and relative depth measurements using camera focus distance | Ozkan Celik, Patricia A. Schulze, Gregory John Freeman, Tommaso Vercesi | 2021-06-08 |
| 10923374 | Walking beam chamber | — | 2021-02-16 |