Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D937329 | Sputter target for a physical vapor deposition chamber | Martin Lee Riker, William Fruchterman, Srinivasa Rao YEDLA, Kirankumar Neelasandra SAVANDAIAH | 2021-11-30 |
| D934315 | Deposition ring for a substrate processing chamber | Keith A. Miller, Goichi Yoshidome | 2021-10-26 |
| 10998172 | Substrate processing chamber having improved process volume sealing | Keith A. Miller, John Mazzocco | 2021-05-04 |