Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D937329 | Sputter target for a physical vapor deposition chamber | Martin Lee Riker, William Fruchterman, Ilya Lavitsky, Kirankumar Neelasandra SAVANDAIAH | 2021-11-30 |
| 10998209 | Substrate processing platforms including multiple processing chambers | Thomas Brezoczky, Kirankumar Neelasandra SAVANDAIAH | 2021-05-04 |