Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D937329 | Sputter target for a physical vapor deposition chamber | Martin Lee Riker, Ilya Lavitsky, Srinivasa Rao YEDLA, Kirankumar Neelasandra SAVANDAIAH | 2021-11-30 |
| 11037768 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, Keith A. Miller +4 more | 2021-06-15 |