Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10998209 | Substrate processing platforms including multiple processing chambers | Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA | 2021-05-04 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10998209 | Substrate processing platforms including multiple processing chambers | Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA | 2021-05-04 |