Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D934315 | Deposition ring for a substrate processing chamber | Ilya Lavitsky, Keith A. Miller | 2021-10-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D934315 | Deposition ring for a substrate processing chamber | Ilya Lavitsky, Keith A. Miller | 2021-10-26 |