Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183375 | Deposition system with multi-cathode and method of manufacture thereof | Anantha K. Subramani, Deepak Jadhav, Ashish Goel, Prashanth Kothnur, Chi Hong Ching | 2021-11-23 |
| 11101117 | Methods and apparatus for co-sputtering multiple targets | Anantha K. Subramani, Wei Wang, Ashish Goel, Srinivas Guggilla, Lavinia Nistor | 2021-08-24 |
| 11043364 | Process kit for multi-cathode processing chamber | Anantha K. Subramani, Ashish Goel, Deepak Jadhav, Rongjun Wang, Chi Hong Ching | 2021-06-22 |
| 11011357 | Methods and apparatus for multi-cathode substrate processing | Anantha K. Subramani, Ashish Goel, Xiaodong Wang, Wei Wang, Rongjun Wang +1 more | 2021-05-18 |
| 10978276 | Substrate processing apparatus including top reflector above annular lamp assembly | Bharath Swaminathan, John Mazzocco | 2021-04-13 |