Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11101117 | Methods and apparatus for co-sputtering multiple targets | Anantha K. Subramani, Hanbing Wu, Wei Wang, Ashish Goel, Lavinia Nistor | 2021-08-24 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11101117 | Methods and apparatus for co-sputtering multiple targets | Anantha K. Subramani, Hanbing Wu, Wei Wang, Ashish Goel, Lavinia Nistor | 2021-08-24 |