Issued Patents 2021
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183375 | Deposition system with multi-cathode and method of manufacture thereof | Anantha K. Subramani, Deepak Jadhav, Hanbing Wu, Prashanth Kothnur, Chi Hong Ching | 2021-11-23 |
| 11101117 | Methods and apparatus for co-sputtering multiple targets | Anantha K. Subramani, Hanbing Wu, Wei Wang, Srinivas Guggilla, Lavinia Nistor | 2021-08-24 |
| 11095175 | Motor | Petr Chmelicek | 2021-08-17 |
| 11043364 | Process kit for multi-cathode processing chamber | Hanbing Wu, Anantha K. Subramani, Deepak Jadhav, Rongjun Wang, Chi Hong Ching | 2021-06-22 |
| 11011357 | Methods and apparatus for multi-cathode substrate processing | Hanbing Wu, Anantha K. Subramani, Xiaodong Wang, Wei Wang, Rongjun Wang +1 more | 2021-05-18 |
| 11005321 | Motor | Petr Chmelicek | 2021-05-11 |
| 11003896 | Entity recognition from an image | Pranav Dandekar, Peter Lofgren, Matthew S. Fisher | 2021-05-11 |
| 10970312 | Content resonance | Srinivasan Rajgopal, Utkarsh Srivastava, Anamitra Banerji | 2021-04-06 |
| 10957565 | Processing tool having a monitoring device | Shimin Mao, Simon Huang, Anantha K. Subramani, Philip Allan Kraus | 2021-03-23 |
| 10903067 | Cooled reflective adapter plate for a deposition chamber | Anantha K. Subramani, Maurice E. Ewert | 2021-01-26 |