Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10903067 | Cooled reflective adapter plate for a deposition chamber | Ashish Goel, Anantha K. Subramani | 2021-01-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10903067 | Cooled reflective adapter plate for a deposition chamber | Ashish Goel, Anantha K. Subramani | 2021-01-26 |