Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183375 | Deposition system with multi-cathode and method of manufacture thereof | Anantha K. Subramani, Ashish Goel, Hanbing Wu, Prashanth Kothnur, Chi Hong Ching | 2021-11-23 |
| 11043364 | Process kit for multi-cathode processing chamber | Hanbing Wu, Anantha K. Subramani, Ashish Goel, Rongjun Wang, Chi Hong Ching | 2021-06-22 |