Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183375 | Deposition system with multi-cathode and method of manufacture thereof | Anantha K. Subramani, Deepak Jadhav, Ashish Goel, Hanbing Wu, Chi Hong Ching | 2021-11-23 |
| 11170982 | Methods and apparatus for producing low angle depositions | Anantha K. Subramani, Praburam Gopal Raja, Steven V. Sansoni, John C. Forster, Philip Allan Kraus +5 more | 2021-11-09 |