Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923367 | Process chamber for etching low K and other dielectric films | Dmitry Lubomirsky, Srinivas D. Nemani, Ellie Yieh | 2021-02-16 |
SB
Sergey G. Belostotskiy
Overall (2021): #269,804 of 548,734Top 50%
1
Patents 2021