Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11195699 | Generalized cylindrical cavity system for microwave rotation and impedance shifting by irises in a power-supplying waveguide | Satoru Kobayashi, Toan Q. Tran, Soonam Park, Dmitry Lubomirsky | 2021-12-07 | $82,478,000 |
| 10903052 | Systems and methods for radial and azimuthal control of plasma uniformity | Satoru Kobayashi, Nikolai Kalnin, Soonam Park, Toan Q. Tran, Dmitry Lubomirsky | 2021-01-26 | $35,448,000 |