Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195699 | Generalized cylindrical cavity system for microwave rotation and impedance shifting by irises in a power-supplying waveguide | Satoru Kobayashi, Hideo Sugai, Soonam Park, Dmitry Lubomirsky | 2021-12-07 |
| 11004661 | Process chamber for cyclic and selective material removal and etching | Soonam Park, Junghoon Kim, Dmitry Lubomirsky | 2021-05-11 |
| 10903052 | Systems and methods for radial and azimuthal control of plasma uniformity | Satoru Kobayashi, Hideo Sugai, Nikolai Kalnin, Soonam Park, Dmitry Lubomirsky | 2021-01-26 |