Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11042094 | Treatment liquid and pattern forming method | Shuji Hirano, Hideaki Tsubaki, Wataru Nihashi, Kei Yamamoto | 2021-06-22 |
| 10962884 | Treatment liquid and pattern forming method | Hideaki Tsubaki, Wataru Nihashi, Kei Yamamoto | 2021-03-30 |
| 10890847 | Pattern forming method, resist pattern, method for manufacturing electronic device, and electronic device | Wataru Nihashi, Hideaki Tsubaki | 2021-01-12 |