Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11042094 | Treatment liquid and pattern forming method | Hideaki Tsubaki, Toru Tsuchihashi, Wataru Nihashi, Kei Yamamoto | 2021-06-22 |
| 11009791 | Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, pattern forming method, and method for manufacturing electronic device | Takamitsu Tomiga, Kenichi Harada, Shinichi Sugiyama, Fumihiro YOSHINO | 2021-05-18 |
| 10928727 | Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, mask blank including actinic ray-sensitive or radiation-sensitive film, pattern forming method, and method for manufacturing | — | 2021-02-23 |