Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156915 | Actinic ray-sensitive or radiation-sensitive composition, method for purifying actinic ray-sensitive or radiation-sensitive composition, pattern forming method, and method for manufacturing electronic device | Hideaki Tsubaki | 2021-10-26 |
| 11042094 | Treatment liquid and pattern forming method | Shuji Hirano, Hideaki Tsubaki, Toru Tsuchihashi, Kei Yamamoto | 2021-06-22 |
| 10962884 | Treatment liquid and pattern forming method | Hideaki Tsubaki, Toru Tsuchihashi, Kei Yamamoto | 2021-03-30 |
| 10890847 | Pattern forming method, resist pattern, method for manufacturing electronic device, and electronic device | Toru Tsuchihashi, Hideaki Tsubaki | 2021-01-12 |