Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11009791 | Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, pattern forming method, and method for manufacturing electronic device | Takamitsu Tomiga, Shinichi Sugiyama, Fumihiro YOSHINO, Shuji Hirano | 2021-05-18 |