Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158527 | Thermal management systems and methods for wafer processing systems | Dmitry Lubomirsky | 2021-10-26 |
| 11062887 | High temperature RF heater pedestals | Soonam Park, Xikun Wang, Dmitry Lubomirsky | 2021-07-13 |
| 11049755 | Semiconductor substrate supports with embedded RF shield | Michael H. Grace, Soonam Park, Dmitry Lubomirsky, Jaeyong Cho, Nikolai Kalnin +1 more | 2021-06-29 |