Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Semiconductor substrate supports with embedded RF shield

Semiconductor substrate supports with embedded RF shield

US Patent 11049755 · Granted Jun 29, 2021

Estimated economic value: $47,858,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Extreme uniformity heated substrate support assembly2025
Extreme uniformity heated substrate support assembly2025
Ion extraction optics having non uniform grid assembly2025
System architecture of manufacturing of semiconductor wafers2025
Semiconductor processing chamber for improved precursor flow2025
Semiconductor processing chamber for improved precursor flow2025
Electrostatic chuck for high bias radio frequency (RF) power application in a pl2025
Cylindrical cavity with impedance shifting by irises in a power-supplying wavegu2025
Cylindrical cavity with impedance shifting by irises in a power-supplying wavegu2025
Advanced temperature control for wafer carrier in plasma processing chamber2025
Metal oxide resist patterning with electrical field guided post-exposure bake2025
Substrate support with multiple embedded electrodes2025