Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate support with multiple embedded electrodes

Substrate support with multiple embedded electrodes

US Patent 10937678 · Granted Mar 2, 2021

Estimated economic value: $62,769,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma chamber with gas cross-flow, microwave resonators and a rotatable pedesta2025
Directional selective junction clean with field polymer protections2025
Nanocrystalline diamond with amorphous interfacial layer2025
Capacitive sensors and capacitive sensing locations for plasma chamber condition2025
Low temperature selective etching of silicon nitride using microwave plasma2025
Low temperature selective etching of silicon nitride using microwave plasma2025
Smart camera substrate2025
Reaction cell for species sensing2025
Methods and apparatus for processing a substrate2025
Symmetric and irregular shaped plasmas using modular microwave sources2025
Symmetric and irregular shaped plasmas using modular microwave sources2025
Isotropic silicon nitride removal2025