| 11205576 |
Monolayer film mediated precision material etch |
Alok Ranjan |
2021-12-21 |
| 11205562 |
Hybrid electron beam and RF plasma system for controlled content of radicals and ions |
Zhiying Chen, Alok Ranjan |
2021-12-21 |
| 11201035 |
Radical source with contained plasma |
Barton Lane |
2021-12-14 |
| 11170981 |
Broadband plasma processing systems and methods |
Jianping Zhao |
2021-11-09 |
| 11158516 |
Plasma processing methods using low frequency bias pulses |
Alok Ranjan, Mitsunori Ohata |
2021-10-26 |
| 11152194 |
Plasma processing apparatuses having a dielectric injector |
Zhiying Chen, Joel Blakeney, Alok Ranjan, Kazuya Nagaseki |
2021-10-19 |
| 11094543 |
Defect correction on metal resists |
Yun Han, Alok Ranjan |
2021-08-17 |
| 11056347 |
Method for dry etching compound materials |
Alok Ranjan |
2021-07-06 |
| 11043362 |
Plasma processing apparatuses including multiple electron sources |
Barton Lane, Zhiying Chen, Alok Ranjan |
2021-06-22 |
| 11037798 |
Self-limiting cyclic etch method for carbon-based films |
Barton Lane, Nasim Eibagi, Alok Ranjan |
2021-06-15 |
| 10998169 |
Systems and methods of control for plasma processing |
Zhiying Chen, Alok Ranjan |
2021-05-04 |
| 10991554 |
Plasma processing system with synchronized signal modulation |
Jianping Zhao, Barton Lane |
2021-04-27 |
| 10910196 |
Mode-switching plasma systems and methods of operating thereof |
Alok Ranjan, Mitsunori Ohata, Michael Hummel |
2021-02-02 |