Issued Patents 2021
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11205576 | Monolayer film mediated precision material etch | Alok Ranjan | 2021-12-21 |
| 11205562 | Hybrid electron beam and RF plasma system for controlled content of radicals and ions | Zhiying Chen, Alok Ranjan | 2021-12-21 |
| 11201035 | Radical source with contained plasma | Barton Lane | 2021-12-14 |
| 11170981 | Broadband plasma processing systems and methods | Jianping Zhao | 2021-11-09 |
| 11158516 | Plasma processing methods using low frequency bias pulses | Alok Ranjan, Mitsunori Ohata | 2021-10-26 |
| 11152194 | Plasma processing apparatuses having a dielectric injector | Zhiying Chen, Joel Blakeney, Alok Ranjan, Kazuya Nagaseki | 2021-10-19 |
| 11094543 | Defect correction on metal resists | Yun Han, Alok Ranjan | 2021-08-17 |
| 11056347 | Method for dry etching compound materials | Alok Ranjan | 2021-07-06 |
| 11043362 | Plasma processing apparatuses including multiple electron sources | Barton Lane, Zhiying Chen, Alok Ranjan | 2021-06-22 |
| 11037798 | Self-limiting cyclic etch method for carbon-based films | Barton Lane, Nasim Eibagi, Alok Ranjan | 2021-06-15 |
| 10998169 | Systems and methods of control for plasma processing | Zhiying Chen, Alok Ranjan | 2021-05-04 |
| 10991554 | Plasma processing system with synchronized signal modulation | Jianping Zhao, Barton Lane | 2021-04-27 |
| 10910196 | Mode-switching plasma systems and methods of operating thereof | Alok Ranjan, Mitsunori Ohata, Michael Hummel | 2021-02-02 |