Issued Patents 2021
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11205576 | Monolayer film mediated precision material etch | Peter Ventzek | 2021-12-21 |
| 11205562 | Hybrid electron beam and RF plasma system for controlled content of radicals and ions | Zhiying Chen, Peter Ventzek | 2021-12-21 |
| 11183398 | Ruthenium hard mask process | Zhiying Chen, Peter L. G. Ventzek | 2021-11-23 |
| 11158516 | Plasma processing methods using low frequency bias pulses | Peter Ventzek, Mitsunori Ohata | 2021-10-26 |
| 11152194 | Plasma processing apparatuses having a dielectric injector | Zhiying Chen, Joel Blakeney, Peter Ventzek, Kazuya Nagaseki | 2021-10-19 |
| 11133194 | Method for selective etching at an interface between materials | Sergey Voronin, Christopher Catano, Nicholas Joy, Christopher Talone | 2021-09-28 |
| 11094543 | Defect correction on metal resists | Yun Han, Peter Ventzek | 2021-08-17 |
| 11079682 | Methods for extreme ultraviolet (EUV) resist patterning development | Yun Han, Peter L. G. Ventzek | 2021-08-03 |
| 11056347 | Method for dry etching compound materials | Peter Ventzek | 2021-07-06 |
| 11043362 | Plasma processing apparatuses including multiple electron sources | Peter Ventzek, Barton Lane, Zhiying Chen | 2021-06-22 |
| 11037798 | Self-limiting cyclic etch method for carbon-based films | Barton Lane, Nasim Eibagi, Peter Ventzek | 2021-06-15 |
| 10998170 | Method for ion mass separation and ion energy control in process plasmas | Yusuke Yoshida, Sergey Voronin, David J. Coumou, Scott E. White | 2021-05-04 |
| 10998169 | Systems and methods of control for plasma processing | Peter Ventzek, Zhiying Chen | 2021-05-04 |
| 10991594 | Method for area-selective etching of silicon nitride layers for the manufacture of microelectronic workpieces | Sonam D. Sherpa | 2021-04-27 |
| 10971373 | Methods for cyclic etching of a patterned layer | Vinayak Rastogi | 2021-04-06 |
| 10937662 | Method of isotropic etching of silicon oxide utilizing fluorocarbon chemistry | Sonam D. Sherpa | 2021-03-02 |
| 10937664 | Surface modification process | Cedric Thomas, Andrew Nolan | 2021-03-02 |
| 10910196 | Mode-switching plasma systems and methods of operating thereof | Peter Ventzek, Mitsunori Ohata, Michael Hummel | 2021-02-02 |