Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152194 | Plasma processing apparatuses having a dielectric injector | Zhiying Chen, Peter Ventzek, Alok Ranjan, Kazuya Nagaseki | 2021-10-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152194 | Plasma processing apparatuses having a dielectric injector | Zhiying Chen, Peter Ventzek, Alok Ranjan, Kazuya Nagaseki | 2021-10-19 |